Concepedia

Leonid A. Sjmaenok

LA

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Publications

2

Citations

61

H-Index

2

Active since

2012

Affiliations

Russian Academy of Sciences(Current)

Leonid A. Sjmaenok is an author at Russian Academy of Sciences specializing in ultraviolet light, applied physics, and engineering.

Top concepts

Publications per year

2012–2012

2

Publications

2

Free-standing spectral purity filters for extreme ultraviolet lithography

Evgeny B. Kluenkov, A. Ya. Lopatin, Leonid A. Sjmaenok et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 41 citations

, , +21

Source for extreme ultraviolet lithography based on plasma sustained by millimeter-wave gyrotron radiation

D. A. Mansfeld, Leonid A. Sjmaenok, A. V. Vodopyanov · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 20 citations

, , +20

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