S. Yu. Zuev

Advanced materials for multilayer mirrors for extreme ultraviolet solar astronomy

Sergey Kuzin, D. E. Pariev, S. V. Shestov et al. · Applied Optics · 2016 · 71 citations

Be/Al-based multilayer mirrors with improved reflection and spectral selectivity for solar astronomy above 17 nm wavelength

D. E. Pariev, Roman Shaposhnikov, I. L. Stroulea et al. · Thin Solid Films · 2017 · 58 citations

Materials Science, Aluminium Nitride, Optical Materials +11

Multilayer coated reflective optics for Extreme UV lithography

E. Louis, H.-J. Voorma, N.B. Koster et al. · Microelectronic Engineering · 1995 · 52 citations

Materials Science, Optical Materials, Engineering +8

<title>Laboratory methods for investigations of multilayer mirrors in extreme ultraviolet and soft x-ray region</title>

M. S. Bibishkin, D. P. Chekhonadskih, E. B. Kluyenkov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 51 citations

X-ray Spectroscopy, Engineering, Microscopy +22

<title>Multilayer Zr/Si filters for EUV lithography and for radiation source metrology</title>

M. S. Bibishkin, E. B. Kluenkov, A. Ya. Lopatin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 40 citations

Engineering, Electron-beam Lithography, Euv Lithography +19