D. E. Pariev

High-reflection Mo/Be/Si multilayers for EUV lithography

A. N. Nechay, D. E. Pariev, F. Schäfers et al. · Optics Letters · 2017 · 77 citations

Materials Engineering, Materials Science, Engineering +14

Advanced materials for multilayer mirrors for extreme ultraviolet solar astronomy

Sergey Kuzin, D. E. Pariev, S. V. Shestov et al. · Applied Optics · 2016 · 71 citations

Be/Al-based multilayer mirrors with improved reflection and spectral selectivity for solar astronomy above 17 nm wavelength

D. E. Pariev, Roman Shaposhnikov, I. L. Stroulea et al. · Thin Solid Films · 2017 · 58 citations

Materials Science, Aluminium Nitride, Optical Materials +11

Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography

A. N. Nechay, D. E. Pariev, D. A. Tatarskiy et al. · Optics Express · 2018 · 55 citations · Full text

Extended model for the reconstruction of periodic multilayers from extreme ultraviolet and X-ray reflectivity data

D. E. Pariev, A. N. Nechay, Yuly Vainer et al. · Journal of Applied Crystallography · 2017 · 51 citations

Optical Materials, X-ray Spectroscopy, Engineering +23