Concepedia

Masayuki Shiraishi

MS

5

Publications

61

Citations

5

H-Index

1998

Active since

Affiliations

Nikon (Japan)(Current)

Masayuki Shiraishi is an author at Nikon (Japan) specializing in engineering, applied physics, and optical properties.

Top concepts

Publications per year

1998–2015

5

Publications

5

Development of projection optics set-3 for high-numerical-aperture extreme ultraviolet exposure tool (HiNA)

Tetsuya Oshino, Shinichi Takahashi, Takahiro Yamamoto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 13 citations

, , +11

Mo/Si multilayers deposited by low-pressure rotary magnet cathode sputtering for extreme-ultraviolet lithography

Masayuki Shiraishi, Noriaki Kandaka, Katsuhiko Murakami · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 13 citations

Low-Stress Molybdenum/Silicon Multilayer Coatings for Extreme Ultraviolet Lithography

Masayuki Shiraishi, Wakana Ishiyama, Tetsuya Oshino et al. · Japanese Journal of Applied Physics · 2000 · 13 citations

, , +16

Directed self-assembly lithography using coordinated line epitaxy (COOL) process

Yuriko Seino, Yusuke Kasahara, Katsutoshi Kobayashi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 12 citations

, , +15

Morphologic and mucin histochemical analysis of transitional zones in advanced ulcerated colorectal carcinomas: potential prognostic indicators

Osamu Tamai, Hiroshi Miyazato, Masayuki Shiraishi et al. · Journal of Surgical Oncology · 1998 · 10 citations

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