Masayuki Shiraishi - Concepedia

Author

Masayuki Shiraishi

Also Known As

Masayuki SHIRAISHI, Masayuki Shiraishi

Publications

126

Citations

H-Index

Concepts

All Affiliations

Masayuki Shiraishi is an author at Nikon (Japan) specializing in engineering, applied physics, and optical properties.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	38
2	Applied Physics	3	3	38
3	Materials Science	2	2	25
4	Materials Engineering	1	1	13
5	Physics	1	1	13

Masayuki Shiraishi

Publications

Citations

H-Index

Page 1

	Year	Citations
Development of projection optics set-3 for high-numerical-aperture extreme ultraviolet exposure tool (HiNA) Tetsuya Oshino, Shinichi Takahashi, Takahiro Yamamoto, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Projection OpticsMirror PolishingEngineeringOphthalmologyOptical Properties	2004	13
Mo/Si multilayers deposited by low-pressure rotary magnet cathode sputtering for extreme-ultraviolet lithography Masayuki Shiraishi, Noriaki Kandaka, Katsuhiko Murakami Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2003	13
Low-Stress Molybdenum/Silicon Multilayer Coatings for Extreme Ultraviolet Lithography Masayuki Shiraishi, Wakana Ishiyama, Tetsuya Oshino, Japanese Journal of Applied Physics Optical MaterialsEngineeringLow-stress MultilayersIon Beam SputteringSilicon On Insulator	2000	13
Directed self-assembly lithography using coordinated line epitaxy (COOL) process Yuriko Seino, Yusuke Kasahara, Katsutoshi Kobayashi, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Materials ScienceWafer Scale ProcessingEngineeringElectron-beam LithographyCrystalline Defects	2015	12
Morphologic and mucin histochemical analysis of transitional zones in advanced ulcerated colorectal carcinomas: potential prognostic indicators Osamu Tamai, Hiroshi Miyazato, Masayuki Shiraishi, Journal of Surgical Oncology	1998	10

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