Concepedia

Wakana Ishiyama

WI

2

Publications

38

Citations

2

H-Index

1999

Active since

Affiliations

Nikon (Japan)(Current)

Wakana Ishiyama is an author at Nikon (Japan) specializing in applied physics, optical properties, and engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceOptical PropertiesPhysicsSurface ScienceMicrofabricationOptical MaterialsNeutron ScatteringMaterials Engineering

Publications per year

1999–2000

2

Publications

2

Enhancement of reflectivity of multilayer neutron mirrors by ion polishing: optimization of the ion beam parameters

Kazuhiko Soyama, Wakana Ishiyama, Katsuhiko Murakami · Journal of Physics and Chemistry of Solids · 1999 · 25 citations

Materials Science, Ion Implantation, Engineering +9

Low-Stress Molybdenum/Silicon Multilayer Coatings for Extreme Ultraviolet Lithography

Masayuki Shiraishi, Wakana Ishiyama, Tetsuya Oshino et al. · Japanese Journal of Applied Physics · 2000 · 13 citations

Optical Materials, Engineering, Low-stress Multilayers +16

Rows per page

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