Tetsuya Oshino

Schwarzschild microscope for carbon Kα radiation

Katsuhiko Murakami, Tetsuya Oshino, Hiroshi Nakamura et al. · Applied Optics · 1993 · 42 citations

Natural Sciences, Materials Science, Physics +10

Lithographic performance of high-numerical-aperture (NA=0.3) EUV small-field exposure tool (HINA)

Hiroaki Oizumi, Yusuke Tanaka, Fumiaki Kumasaka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 36 citations

Natural Sciences, Physics, Optical Materials +8

Flare modeling and calculation on EUV optics

M Shiraishi, Tetsuya Oshino, Katsuhiko Murakami et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 20 citations

Natural Sciences, Physics, Optical Materials +12

Development status of projection optics and illumination optics for EUV1

Katsuhiko Murakami, Tetsuya Oshino, Hiroyuki Kondo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 18 citations

Natural Sciences, Physics, Optical Materials +8

Development of projection optics set-3 for high-numerical-aperture extreme ultraviolet exposure tool (HiNA)

Tetsuya Oshino, Shinichi Takahashi, Takahiro Yamamoto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 13 citations

Natural Sciences, Physics, Biomedical Optics +7