Concepedia

Noriaki Kandaka

NK

6

Publications

148

Citations

6

H-Index

1991

Active since

Affiliations

High Energy Accelerator Research Organization(Current)

University of Tsukuba

Nikon (Japan)

Tokyo University of Science

Noriaki Kandaka is an author at High Energy Accelerator Research Organization specializing in engineering, optical properties, and physics.

Top concepts

Publications per year

1991–2004

6

Publications

6

Elliptical-polarization analyses of synchrotron radiation in the 5–80-eV region with a reflection polarimeter

T. Koide, Masatada Yuri, Noriaki Kandaka et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 1991 · 70 citations

, , +10

Production and direct measurement of circularly polarized vacuum-ultraviolet light with multireflection optics

T. Koide, Masatada Yuri, Noriaki Kandaka et al. · Applied Physics Letters · 1991 · 26 citations

, , +20

Elliptical-polarization measurements in the vacuum ultraviolet and soft x-ray regions with a reflection polarimeter

T. Koide, Masatada Yuri, Noriaki Kandaka et al. · Review of Scientific Instruments · 1992 · 16 citations

, , +18

Development of projection optics set-3 for high-numerical-aperture extreme ultraviolet exposure tool (HiNA)

Tetsuya Oshino, Shinichi Takahashi, Takahiro Yamamoto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 13 citations

, , +11

Mo/Si multilayers deposited by low-pressure rotary magnet cathode sputtering for extreme-ultraviolet lithography

Masayuki Shiraishi, Noriaki Kandaka, Katsuhiko Murakami · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 13 citations

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