Shuichi Tamamushi

Observation of Undulator Radiation. I. Operation Studies and Visual Observation

Hideo Kitamura, Shuichi Tamamushi, Tatsuya Yamakawa et al. · Japanese Journal of Applied Physics · 1982 · 17 citations

Engineering, Radiation Exposure, Radiation Protection +16

Mask process correction (MPC) modeling and its application to EUV mask for electron beam mask writer EBM-7000

Takashi Kamikubo, Takayuki Ohnishi, Shigehiro Hara et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 17 citations

Electrical Engineering, Engineering, Electron-beam Lithography +10

Modeling of charging effect and its correction by EB mask writer EBM-6000

Noriaki Nakayamada, Seiji Wake, Takashi Kamikubo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 16 citations

Electrical Engineering, Engineering, Electron-beam Lithography +13

Absolute measurement of undulator radiation in the extreme ultraviolet

H. Maezawa, S. Mitani, Yoshio Suzuki et al. · Nuclear Instruments and Methods in Physics Research · 1983 · 11 citations

Ultraviolet Light, Physics, Natural Sciences +5

Study of heating effect on CAR in electron beam mask writing

Takashi Kamikubo, Makoto Hiramoto, Jun Yashima et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 11 citations

Lower Sensitivity Resist, Electrical Engineering, Engineering +9