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Takayuki Ohnishi

TO

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Publications

1

Citations

17

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1

Active since

2010

Takayuki Ohnishi is an author specializing in instrumentation, engineering, and computer engineering.

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Publications per year

2010–2010

1

Publications

1

Mask process correction (MPC) modeling and its application to EUV mask for electron beam mask writer EBM-7000

Takashi Kamikubo, Takayuki Ohnishi, Shigehiro Hara et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 17 citations

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