Yong-Hyun Ham

Dual etch processes of via and metal paste filling for through silicon via process

Yong-Hyun Ham, Dong‐Pyo Kim, Kun-Sik Park et al. · Thin Solid Films · 2011 · 25 citations

Materials Science, Materials Engineering, Metal Paste Filling +11

Etching characteristics and mechanism of ZnO thin films in inductively coupled HBr/Ar plasma

Yong-Hyun Ham, Alexander Efremov, Sun Jin Yun et al. · Thin Solid Films · 2009 · 23 citations

Materials Science, Materials Engineering, Electrical Engineering +12

Surface characteristics of parylene-C films in an inductively coupled O2/CF4 gas plasma

Yong-Hyun Ham, D. A. Shutov, Kyu‐Ha Baek et al. · Thin Solid Films · 2010 · 21 citations

Materials Science, Engineering, O2/cf4 Gas Plasma +8

Design, fabrication, and experimental demonstration of a piezoelectric cantilever for a low resonant frequency microelectromechanical system vibration energy harvester

Moonkeun Kim, Beomseok Hwang, Yong-Hyun Ham et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 16 citations

Engineering, Energy Efficiency, Energy Conversion +20

Etching characteristics and mechanism of indium tin oxide films in an inductively coupled HBr∕Ar plasma

Kwang‐Ho Kwon, Alexander Efremov, Yong-Hyun Ham et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 11 citations

Engineering, Hbr∕ar Plasma, Ito Etch Rate +17