I. Post

A 22nm high performance and low-power CMOS technology featuring fully-depleted tri-gate transistors, self-aligned contacts and high density MIM capacitors

C. Auth, C. Allen, A. Blattner et al. · 2012 · 749 citations

Low-power Cmos Technology, Engineering, Vlsi Design +19

A 10nm high performance and low-power CMOS technology featuring 3^rd generation FinFET transistors, Self-Aligned Quad Patterning, contact over active gate and cobalt local interconnects

C. Auth, A. Aliyarukunju, M. Asoro et al. · 2017 · 353 citations

Engineering, Integrated Circuits, High Performance +18

A high performance 180 nm generation logic technology

Shih‐Chi Yang, Sally Ahmed, B. Arcot et al. · 2002 · 89 citations

Low-power Electronics, Materials Engineering, Electrical Engineering +13

Self-heat reliability considerations on Intel's 22nm Tri-Gate technology

C. Prasad, Lei Jiang, D. Singh et al. · 2013 · 84 citations

Engineering, Self-heat Reliability Considerations, Computer Architecture +16

A 32nm SoC platform technology with 2<sup>nd</sup> generation high-k/metal gate transistors optimized for ultra low power, high performance, and high density product applications

C.-H. Jan, M. Agostinelli, Markus J. Buehler et al. · 2009 · 75 citations

Engineering, Vlsi Design, Computer Architecture +20