Concepedia

I. C. Abraham

IC

11

Publications

269

Citations

11

H-Index

1993

Active since

Affiliations

Sandia National Laboratories(Current)

University of Wisconsin–Madison

Johannes Kepler University of Linz

I. C. Abraham is an author at Sandia National Laboratories specializing in engineering, applied physics, and physics.

Top concepts

EngineeringApplied PhysicsPhysicsPlasma PhysicsPlasma DiagnosticsElectrical EngineeringPulse PowerPlasma TheoryInstrumentationPlasma Confinement

Publications per year

1993–2003

11

Publications

11

Ion energy distributions at rf-biased wafer surfaces

J. R. Woodworth, I. C. Abraham, M. E. Riley et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 53 citations

Gridded Energy Analyzer, Engineering, Radio Frequency +18

Charged species dynamics in an inductively coupled Ar/SF6 plasma discharge

Shahid Rauf, Peter L. G. Ventzek, I. C. Abraham et al. · Journal of Applied Physics · 2002 · 45 citations

Engineering, Glow Discharge, Plasma Science +16

Characterization of electron and negative ion densities in fluorocarbon containing inductively driven plasmas

G. A. Hebner, I. C. Abraham · Journal of Applied Physics · 2001 · 38 citations

Engineering, Glow Discharge, Chemistry +17

SiO2 to Si selectivity mechanisms in high density fluorocarbon plasma etching

K. H. R. Kirmse, A. Wendt, Sabrina Disch et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 33 citations

Engineering, Si Selectivity Mechanisms, Glow Discharge +21

Absolute densities of long lived species in an ionized physical vapor deposition copper–argon plasma

Y. Andrew, I. C. Abraham, John H. Booske et al. · Journal of Applied Physics · 2000 · 22 citations · Full text

Optical Materials, X-ray Spectroscopy, Engineering +19

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