Concepedia

Christoph Ebm

CE

Statistics

Publications

3

Citations

45

H-Index

3

Active since

2009

Affiliations

IMS Nanofabrication (Austria)(Current)

Christoph Ebm is an author at IMS Nanofabrication (Austria) specializing in applied physics, engineering, and microelectronics.

Top concepts

EngineeringApplied PhysicsNanotechnologyMicroelectronicsMicrofabricationElectrical EngineeringPhysicsPhotonicsNanophotonicsInstrumentation

Publications per year

2009–2011

3

Publications

3

Assessment of approximations for efficient topography simulation of ion beam processes: 10keV Ar on Si

Christoph Ebm, G. Hobler · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2009 · 23 citations

Electrical Engineering, Ion Implantation, Engineering +9

Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition

Christoph Ebm, Elmar Platzgummer, Hans Loeschner et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 11 citations

Engineering, Electron-beam Lithography, Ion Multibeam +19

Quantitative simulation of ion-beam induced deposition of nanostructures

Christoph Ebm, G. Hobler, Simon Waid et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 11 citations

Materials Engineering, Beam Diameter, Ion Implantation +12

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