Concepedia

David C. Gray

DC

Statistics

Publications

4

Citations

379

H-Index

4

Active since

1991

Affiliations

Massachusetts Institute of Technology(Current)

David C. Gray is an author at Massachusetts Institute of Technology specializing in applied physics, microelectronics, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationChemical KineticsChemical EngineeringIntegrated CircuitsMaterials Engineering

Publications per year

1991–1994

4

Publications

4

Phenomenological modeling of ion-enhanced surface kinetics in fluorine-based plasma etching

David C. Gray, I. Tepermeister, Herbert H. Sawin · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 251 citations

Chemical Kinetics, Engineering, Ion-enhanced Surface Kinetics +19

Redeposition kinetics in fluorocarbon plasma etching

David C. Gray, Vivek Mohindra, Herbert H. Sawin · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 49 citations

Engineering, Redeposition Kinetics, Vacuum Device +17

Quantification of surface film formation effects in fluorocarbon plasma etching of polysilicon

David C. Gray, Herbert H. Sawin, Jeffrey W. Butterbaugh · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 42 citations

Materials Science, Materials Engineering, Engineering +14

Influence of reactant transport on fluorine reactive ion etching of deep trenches in silicon

John Arnold, David C. Gray, Herbert H. Sawin · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 37 citations

Engineering, Deep Trenches, Integrated Circuits +17

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