Concepedia

Vivek Mohindra

VM

Statistics

Publications

2

Citations

84

H-Index

2

Active since

1994

Affiliations

Massachusetts Institute of Technology(Current)

Vivek Mohindra is an author at Massachusetts Institute of Technology specializing in engineering, chemical engineering, and chemical kinetics.

Top concepts

Publications per year

1994–1997

2

Publications

2

Redeposition kinetics in fluorocarbon plasma etching

David C. Gray, Vivek Mohindra, Herbert H. Sawin · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 49 citations

, , +17

Abatement of perfluorocompounds (PFCs) in a microwave tubular reactor using O/sub 2/ as an additive gas

Vivek Mohindra, Heeyeop Chae, Herbert H. Sawin et al. · IEEE Transactions on Semiconductor Manufacturing · 1997 · 35 citations

, , +7

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