Statistics
Publications
9
Citations
292
H-Index
9
Active since
1987
Affiliations
Y. Kamata is an author at Toshiba (Japan) specializing in engineering, semiconductor materials, and materials science.
Publications per year
1987–2014
9
9
Effects of nitrogen in HfSiON gate dielectric on the electrical and thermal characteristics
M. Koyama, A. Kaneko, Tsunehiro Ino et al. · 2003 · 77 citations
1–5 of 9