Chong-Cheng Fu

Ultrathin polymer films for microlithography

S. W. J. Kuan, C. W. Frank, Chong-Cheng Fu et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 49 citations

Engineering, Electron-beam Lithography, Ultrathin Polymer Films +17

Content-addressable memory for VLSI pattern inspection

S.-I. Chae, J.T.S. Walker, Chong-Cheng Fu et al. · IEEE Journal of Solid-State Circuits · 1988 · 13 citations

Engineering, Vlsi Design, Hardware Verification Language +17

Practicing extension of 248-nm DUV optical lithography using trim-mask PSM

Michael E. Kling, N. Cave, Bradley J. Falch et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 12 citations

Photonics, Electrical Engineering, Duv Microlithography +15

Approximation of three dimensional mask effects with two dimensional features

Min Bai, Lawrence S. Melvin, Qiliang Yan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 12 citations

Engineering, Feature Detection, Dimensional Mask Effects +23

Improvement of mask-limited yield with a vote-taking lithographic scheme

Chong-Cheng Fu, David H. Dameron · IEEE Electron Device Letters · 1984 · 10 citations

Photonics, Lithographic Technique, Optical Materials +13