Concepedia

Michael E. Kling

ME

3

Publications

34

Citations

3

H-Index

1999

Active since

Affiliations

Motorola (United States)(Current)

Michael E. Kling is an author at Motorola (United States) specializing in engineering, computer engineering, and applied physics.

Top concepts

Publications per year

1999–2005

3

Publications

3

Practicing extension of 248-nm DUV optical lithography using trim-mask PSM

Michael E. Kling, N. Cave, Bradley J. Falch et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 12 citations

, , +15

A high performance 1.5 V, 0.10 μm gate length CMOS technology with scaled copper metallization

P. Gilbert, I. Yang, C. Pettinato et al. · 2002 · 12 citations

, , +16

Comparison of preconstruction and 2003 bathymetric and topographic surveys of Lake McConaughy, Nebraska

Wade H. Kress, Sonja K. Sebree, Gregory R. Littin et al. · Scientific investigations report · 2005 · 10 citations

, , +16

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