Concepedia

S. W. J. Kuan

SW

6

Publications

306

Citations

6

H-Index

1988

Active since

Affiliations

Stanford University(Current)

S. W. J. Kuan is an author at Stanford University specializing in engineering, materials science, and microfabrication.

Top concepts

EngineeringMaterial SciencePolymer ScienceMicrofabricationApplied PhysicsThin FilmsNanotechnologyElectronic MaterialsPolymer NanocompositesPolymers

Publications per year

1988–1989

6

Publications

6

Imaging and modification of polymers by scanning tunneling and atomic force microscopy

T. R. Albrecht, Moris Dovek, C. A. Lang et al. · Journal of Applied Physics · 1988 · 165 citations · Full text

Atomic Force Microscopy, Engineering, Polymer Nanotechnology +21

Ultrathin polymer films for microlithography

S. W. J. Kuan, C. W. Frank, Chong-Cheng Fu et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 49 citations

Engineering, Electron-beam Lithography, Ultrathin Polymer Films +17

Ultrathin poly(methylmethacrylate) resist films for microlithography

S. W. J. Kuan, C. W. Frank, Y. H. Yen Lee et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 33 citations

Engineering, Electron-beam Lithography, Thin Film Process Technology +17

Observation and manipulation of polymers by scanning tunnelling and atomic force microscopy

Moris Dovek, T. R. Albrecht, S. W. J. Kuan et al. · Journal of Microscopy · 1988 · 32 citations

Atomic Force Microscopy, Engineering, Mechanical Engineering +18

Exposure of ultrathin polymer resists with the scanning tunneling microscope

H. Zhang, L. S. Hordon, S. W. J. Kuan et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 16 citations

Engineering, Electron-beam Lithography, Microscopy +20

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