Concepedia

Author

S. W. J. Kuan

Stanford University

Also Known As

S. W. J. Kuan

12

Publications

310

Citations

6

H-Index

30

Concepts

All Affiliations

Stanford University
SW

About

S. W. J. Kuan is an author at Stanford University specializing in engineering, materials science, and microfabrication.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

6

6

306

2

Applied Physics

4

4

109

3

Medicine

1

1

165

4

Chemistry

1

1

32

5

Electrical Engineering

1

1

11

S. W. J. Kuan

×

6

Publications

306

Citations

6

H-Index

YearCitations

Imaging and modification of polymers by scanning tunneling and atomic force microscopy

T. R. Albrecht, Moris Dovek, C. A. Lang,

Journal of Applied Physics

1988

165

Ultrathin polymer films for microlithography

S. W. J. Kuan, C. W. Frank, Chong-Cheng Fu,

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

1988

49

Ultrathin poly(methylmethacrylate) resist films for microlithography

S. W. J. Kuan, C. W. Frank, Y. H. Yen Lee,

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

1989

33

Observation and manipulation of polymers by scanning tunnelling and atomic force microscopy

Moris Dovek, T. R. Albrecht, S. W. J. Kuan,

Journal of Microscopy

1988

32

Exposure of ultrathin polymer resists with the scanning tunneling microscope

H. Zhang, L. S. Hordon, S. W. J. Kuan,

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

1989

16

Effects of chromium on the reactive ion etching of steep-walled trenches in silicon

N.I. Maluf, Stephen Y. Chou, J.P. McVittie,

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

1989

11

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