Concepedia

Y. H. Yen Lee

YH

1

Publications

33

Citations

1

H-Index

1989

Active since

Affiliations

Stanford University(Current)

Y. H. Yen Lee is an author at Stanford University specializing in nanolithography, nanotechnology, and polymer science.

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Publications per year

1989–1989

1

Publications

1

Ultrathin poly(methylmethacrylate) resist films for microlithography

S. W. J. Kuan, C. W. Frank, Y. H. Yen Lee et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 33 citations

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