Concepedia

M.W. Cresswell

MC

Statistics

Publications

9

Citations

225

H-Index

9

Active since

1992

Affiliations

National Institute of Standards and Technology(Current)

Sandia National Laboratories

M.W. Cresswell is an author at National Institute of Standards and Technology specializing in engineering, instrumentation, and measurement.

Top concepts

Publications per year

1992–2005

9

Publications

9

Traceable calibration of critical-dimension atomic force microscope linewidth measurements with nanometer uncertainty

R. G. Dixson, Richard A. Allen, William F. Guthrie et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 81 citations

, , +22

A new test structure for the electrical measurement of the width of short features with arbitrarily wide voltage taps

Richard A. Allen, M.W. Cresswell, Laurence M. Buck · IEEE Electron Device Letters · 1992 · 30 citations

, , +8

Test structures for referencing electrical linewidth measurements to silicon lattice parameters using HRTEM

Richard A. Allen, Barbara Anne am Ende, M.W. Cresswell et al. · IEEE Transactions on Semiconductor Manufacturing · 2003 · 24 citations

, , +22

High-resolution transmission electron microscopy calibration of critical dimension (CD) reference materials

Richard A. Allen, T.J. Headley, Sarah C. Everist et al. · IEEE Transactions on Semiconductor Manufacturing · 2001 · 23 citations

, , +22

Application of Conformal Mapping Approximation Techniques: Parallel Conductors of Finite Dimensions

Nadine Pesonen, W.K. Kahn, Richard A. Allen et al. · IEEE Transactions on Instrumentation and Measurement · 2004 · 19 citations

, , +12

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