Statistics
Publications
4
Citations
91
H-Index
4
Active since
1993
Affiliations
KLA (Israel)(Current)
Michael E. Adel is an author at KLA (Israel) specializing in engineering, manufacturing engineering, and metrology.
Publications per year
1993–2008
4
4
Diffraction based overlay metrology: accuracy and performance on front end stack
Philippe Leray, Shaunee Cheng, Daniel Kandel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 26 citations
Engineering, Manufacturing Engineering, Materials Engineering +13
Improved overlay control through automated high-order compensation
Shinji Wakamoto, Y. Ishii, Koji Yasukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 19 citations
Engineering, Manufacturing Engineering, Computer-integrated Manufacturing +12
Michael E. Adel, Yaron Ish-Shalom, Shmuel Mangan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 11 citations
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