Concepedia

Michael E. Adel

ME

Statistics

Publications

4

Citations

86

H-Index

4

Active since

1993

Affiliations

KLA (Israel)(Current)

Michael E. Adel is an author at KLA (Israel) specializing in engineering, electronic packaging, and technology.

Top concepts

EngineeringMetrologyTechnologyCalibrationMeasurementApplied PhysicsInstrumentationNatural SciencesOptical PropertiesComputer Engineering

Publications per year

1993–2008

4

Publications

4

Optimized Overlay Metrology Marks: Theory and Experiment

Michael E. Adel, Mark Ghinovker, Boris Golovanevsky et al. · IEEE Transactions on Semiconductor Manufacturing · 2004 · 32 citations

Geometric Modeling, Sensor Calibration, Overlay Metrology Mark +14

Diffraction based overlay metrology: accuracy and performance on front end stack

Philippe Leray, Shaunee Cheng, Daniel Kandel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 24 citations

Front End Stack, Engineering, Measurement +19

Improved overlay control through automated high-order compensation

Shinji Wakamoto, Y. Ishii, Koji Yasukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 19 citations

Overlay Errors, Engineering, Wafer Scale Processing +14

<title>Noncontact temperature monitoring of semiconductors by optical absorption edge sensing</title>

Michael E. Adel, Yaron Ish-Shalom, Shmuel Mangan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 11 citations

Optical Materials, Engineering, Double Layer Dielectrics +24

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