Concepedia

Mark Ghinovker

MG

Statistics

Publications

3

Citations

73

H-Index

3

Active since

2003

Affiliations

KLA (Israel)(Current)

Mark Ghinovker is an author at KLA (Israel) specializing in manufacturing engineering, metrology, and overlay metrology.

Publications per year

2003–2004

3

Publications

3

Optimized Overlay Metrology Marks: Theory and Experiment

Michael E. Adel, Mark Ghinovker, Boris Golovanevsky et al. · IEEE Transactions on Semiconductor Manufacturing · 2004 · 35 citations

, , +16

Performance study of new segmented overlay marks for advanced wafer processing

Mike Adel, John A. Allgair, David C. Benoit et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 20 citations

, , +14

Characterization of overlay mark fidelity

Mike Adel, Mark Ghinovker, J. Poplawski et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 18 citations

, , +14

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