Statistics
Publications
3
Citations
70
H-Index
3
Active since
2003
Affiliations
KLA (Israel)(Current)
Mark Ghinovker is an author at KLA (Israel) specializing in engineering, metrology, and industrial engineering.
Publications per year
2003–2004
3
3
Performance study of new segmented overlay marks for advanced wafer processing
Mike Adel, John A. Allgair, David C. Benoit et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 20 citations
Engineering, Industrial Engineering, Mechanical Engineering +20
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