Concepedia

David C. Benoit

DC

2

Publications

36

Citations

2

H-Index

2000

Active since

Affiliations

KLA (United States)(Current)

Motorola (United States)

David C. Benoit is an author at KLA (United States) specializing in calibration, instrumentation, and industrial engineering.

Top concepts

MetrologyCalibrationEngineeringInstrumentationComputer EngineeringIndustrial EngineeringDesignEducationTechnology3D Printing

Publications per year

2000–2003

2

Publications

2

Performance study of new segmented overlay marks for advanced wafer processing

Mike Adel, John A. Allgair, David C. Benoit et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 20 citations

Engineering, Industrial Engineering, Mechanical Engineering +20

<title>Manufacturing considerations for implementation of scatterometry for process monitoring</title>

John A. Allgair, David C. Benoit, Robert R. Hershey et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 16 citations

Engineering, Process Instrumentation, Industrial Engineering +25

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