Peter Kücher

Statistics

Publications

Citations

156

H-Index

Active since

2008

Affiliations

Fraunhofer Institute for Photonic Microsystems(Current)

Technische Universität Dresden

Helmholtz-Zentrum Dresden-Rossendorf

Peter Kücher is an author at Fraunhofer Institute for Photonic Microsystems specializing in materials science, engineering, and materials engineering.

Publications per year

2008–2011

Publications

Physical and electrical characterization of high-k ZrO2 metal–insulator–metal capacitor

Joo‐Hyung Kim, V. A. Ignatova, Peter Kücher et al. · Thin Solid Films · 2008 · 57 citations

Natural Sciences, Materials Engineering, Materials Science +12

Greenwood–Williamson Model Combining Pattern-Density and Pattern-Size Effects in CMP

Boris Vasilev, Roland Rzehak, Sascha Bott et al. · IEEE Transactions on Semiconductor Manufacturing · 2011 · 37 citations

Engineering, Electrical Engineering, Materials Science +13

A feature scale Greenwood–Williamson model predicting pattern-size effects in CMP

Boris Vasilev, Sascha Bott, Roland Rzehak et al. · Microelectronic Engineering · 2011 · 17 citations

Computing, Computational Engineering, Multiscale Modeling +3

Microstructure in copper interconnects – Influence of plating additive concentration

Jürgen Neuner, I. Zienert, A. Peeva et al. · Microelectronic Engineering · 2009 · 17 citations

Engineering, Materials Engineering, Materials Science +14

A CMP Model Including Global Distribution of Pressure

Sascha Bott, Roland Rzehak, Boris Vasilev et al. · IEEE Transactions on Semiconductor Manufacturing · 2011 · 15 citations

Engineering, Computer Engineering, Mechanical Behavior Of Materials +9

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