Concepedia

Physical and electrical characterization of high-k ZrO2 metal–insulator–metal capacitor

Joo‐Hyung Kim, V. A. Ignatova, Peter Kücher, Johannes Heitmann, L. Oberbeck, U. Schröder

Thin Solid Films · 2008 · 57 citations · 12 references

DOI

Concepts

References

12

Phonons and lattice dielectric properties of zirconia

Xinyuan Zhao, David Vanderbilt · Physical review. B, Condensed matter · 2002 · 532 citations · Full text

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Structural and dielectric properties of crystalline and amorphous ZrO2

David Vanderbilt, Xinyuan Zhao, Davide Ceresoli · Thin Solid Films · 2005 · 188 citations

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DRAM technology perspective for gigabit era

Kinam Kim, Chang-Gyu Hwang, Jong Gil Lee · IEEE Transactions on Electron Devices · 1998 · 146 citations

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Influence of growth temperature on properties of zirconium dioxide films grown by atomic layer deposition

Kaupo Kukli, Mikko Ritala, Jaan Aarik et al. · Journal of Applied Physics · 2002 · 111 citations

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Dielectric properties of crystalline and amorphous transition metal oxides and silicates as potential high-κ candidates: the contribution of density-functional theory

Journal of Physics Condensed Matter · 2005 · 108 citations

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