Concepedia
Statistics
Publications
5
Citations
130
H-Index
Active since
2011
Affiliations
Technische Universität Dresden(Current)
Fraunhofer Institute for Photonic Microsystems
Helmholtz-Zentrum Dresden-Rossendorf
Sascha Bott is an author at Technische Universität Dresden specializing in engineering, planarization, and materials science.
Publications per year
2011–2013
Greenwood–Williamson Model Combining Pattern-Density and Pattern-Size Effects in CMP
Boris Vasilev, Roland Rzehak, Sascha Bott et al. · IEEE Transactions on Semiconductor Manufacturing · 2011 · 37 citations
Engineering, Electrical Engineering, Materials Science +13
A method for characterizing the pad surface texture and modeling its impact on the planarization in CMP
Boris Vasilev, Sascha Bott, Roland Rzehak et al. · Microelectronic Engineering · 2012 · 34 citations
Engineering, Materials Engineering, Materials Science +11
Pad roughness evolution during break-in and its abrasion due to the pad-wafer contact in oxide CMP
Boris Vasilev, Sascha Bott, Roland Rzehak et al. · Microelectronic Engineering · 2013 · 27 citations
Engineering, Materials Engineering, Materials Science +16
A feature scale Greenwood–Williamson model predicting pattern-size effects in CMP
Boris Vasilev, Sascha Bott, Roland Rzehak et al. · Microelectronic Engineering · 2011 · 17 citations
Computing, Computational Engineering, Multiscale Modeling +3
A CMP Model Including Global Distribution of Pressure
Sascha Bott, Roland Rzehak, Boris Vasilev et al. · IEEE Transactions on Semiconductor Manufacturing · 2011 · 15 citations
Engineering, Computer Engineering, Mechanical Behavior Of Materials +9
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