Eiji Ikawa

Low-energy electron energy loss spectroscopy of Cl adsorbed Si(111), Si(100) and Si(110) surfaces

Nahomi Aoto, Eiji Ikawa, Yukinori Kurogi · Surface Science · 1988 · 78 citations

Natural Sciences, Materials Science, Physics +12

A capacitor-over-bit-line (COB) cell with a hemispherical-grain storage node for 64 Mb DRAMs

M. Sakao, N. Kasai, T. Ishijima et al. · 2002 · 45 citations

Engineering, Computer Engineering, Electrical Engineering +16

New stacked capacitor structure using hemispherical-grain polycrystalline-silicon electrodes

Hirohito Watanabe, Nahomi Aoto, S. Adachi et al. · Applied Physics Letters · 1991 · 29 citations

Engineering, Materials Engineering, Materials Science +17

Oxide Etching Using Surface Wave Coupled Plasma

Takeshi Akimoto, Eiji Ikawa, Toshiaki Sango et al. · Japanese Journal of Applied Physics · 1994 · 19 citations

Natural Sciences, Physics, Microfabrication +10

Analysis of Fluorocarbon Film Deposited by Highly Selective Oxide Etching

Takeshi Akimoto, Shuichi Furuoya, Keiichi Harasima Keiichi Harasima et al. · Japanese Journal of Applied Physics · 1994 · 19 citations

Natural Sciences, Materials Engineering, Materials Science +16