Statistics
Publications
1
Citations
19
H-Index
1
Active since
1994
Affiliations
NEC (Japan)(Current)
Toshiaki Sango is an author at NEC (Japan) specializing in thin film etching, etching, and microfabrication.
Publications per year
1994–1994
1
1
Oxide Etching Using Surface Wave Coupled Plasma
Takeshi Akimoto, Eiji Ikawa, Toshiaki Sango et al. · Japanese Journal of Applied Physics · 1994 · 19 citations
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