Statistics
Publications
3
Citations
56
H-Index
3
Active since
1994
Affiliations
NEC (Japan)(Current)
Takeshi Akimoto is an author at NEC (Japan) specializing in etching processes, plasma-surface interactions, and surface etching.
Publications per year
1994–1995
3
3
Oxide Etching Using Surface Wave Coupled Plasma
Takeshi Akimoto, Eiji Ikawa, Toshiaki Sango et al. · Japanese Journal of Applied Physics · 1994 · 19 citations
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