Concepedia
Statistics
Publications
1
Citations
18
H-Index
Active since
1995
Affiliations
NEC (Japan)(Current)
H. Nanbu is an author at NEC (Japan) specializing in plasma etching, gas flow, and etching processes.
Publications per year
1995–1995
Reactive ion etching lag on high rate oxide etching using high density plasma
Takeshi Akimoto, H. Nanbu, Eiji Ikawa · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 18 citations
Natural Sciences, Materials Science, Physics +13
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