Concepedia

S. Brodsky

SB

Statistics

Publications

7

Citations

297

H-Index

7

Active since

1984

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

IBM (United States)

S. Brodsky is an author at IBM Research - Thomas J. Watson Research Center specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceMicroelectronicsMicrofabricationElectrical EngineeringPhysicsMaterials EngineeringThin Films

Publications per year

1984–1992

7

Publications

7

Sub-μm, planarized, Nb-AlO<i>x</i>-Nb Josephson process for 125 mm wafers developed in partnership with Si technology

M. B. Ketchen, D.J. Pearson, A. W. Kleinsasser et al. · Applied Physics Letters · 1991 · 107 citations

Superconducting Material, Engineering, Si Technology +17

Interaction Between Ti and SiO2

C. Y. Ting, M. Wittmer, Subramanian S. Iyer et al. · Journal of The Electrochemical Society · 1984 · 79 citations

Materials Engineering, Inorganic Chemistry, Materials Science +15

Electrical Characterization of ZrN

L. Krusin‐Elbaum, S. Brodsky, K. Y. Ahn · MRS Proceedings · 1986 · 39 citations

Electrical Engineering, Engineering, Resistor +4

Formation of TiSi2 and TiN during nitrogen annealing of magnetron sputtered Ti films

E. D. Adams, K. Y. Ahn, S. Brodsky · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 26 citations

Engineering, Thin Film Process Technology, Chemical Deposition +19

Collimated sputtering of TiN/Ti liners into sub-half-micrometer high aspect ratio contacts/lines

S. Brodsky · Applied Physics Letters · 1992 · 19 citations

Engineering, Thin Film Process Technology, Chemical Deposition +17

1–5 of 7