6
Publications
138
Citations
6
H-Index
1978
Active since
Affiliations
Yuzo Hayashi is an author at Koken (Japan) specializing in engineering, physics, and natural sciences.
Top concepts
EngineeringPhysicsChemistryNatural SciencesSynchrotron RadiationMagnetismPlasma TheoryPlasma PhysicsApplied PhysicsMicroelectronics
Publications per year
1978–1999
6
6
A large-area ECR processing plasma
Wataru Miyazawa, Shigekazu Tada, Kohichi Ito et al. · Plasma Sources Science and Technology · 1996 · 27 citations
Electron Density, Electrical Engineering, Source Diameter +12
Shoji Den, Tatsushi Kuno, Masafumi Ito et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 21 citations
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