A large-area ECR processing plasma

Abstract

This paper describes an improved large-diameter electron cyclotron resonance (ECR) source which employs a strip-bar antenna. By launching a 2.45 GHz microwave near the magnetic field of permanent magnets of alternative polarity set along closed loops, an ECR plasma is produced. The source diameter is 30 cm. The characteristics of an oxygen plasma produced with this modified source are an electron density of , electron temperature of 3 eV and space potential with respect to the chamber wall of less than 20 V. A high plasma density of uniformity within % over 30 cm is achieved.