Shoji Den

Initial growth process of carbon nanowalls synthesized by radical injection plasma-enhanced chemical vapor deposition

Shingo Kondo, Shinji Kawai, Wakana Takeuchi et al. · Journal of Applied Physics · 2009 · 126 citations

Nanosheet, Engineering, Chemistry +16

Highly reliable growth process of carbon nanowalls using radical injection plasma-enhanced chemical vapor deposition

Shingo Kondo, Masaru Hori, Kōji Yamakawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 86 citations

Materials Science, Chemical Engineering, Engineering +14

Ultrahigh-speed etching of SiO2 with ultrahigh selectivity over Si in microwave-excited non equilibrium atmospheric pressure plasma

Kōji Yamakawa, Masaru Hori, Toshio Goto et al. · Applied Physics Letters · 2004 · 34 citations

Selective Etching, Engineering, Vacuum Device +16

Development of atomic radical monitoring probe and its application to spatial distribution measurements of H and O atomic radical densities in radical-based plasma processing

Shunji Takahashi, Seigo Takashima, Kōji Yamakawa et al. · Journal of Applied Physics · 2009 · 33 citations

Radical Emission, Physics, Microscopy +15

Development and Applications of a Compact Electron Cyclotron Resonance Source

Patrick O’Keeffe, Shuji Komuro, Shoji Den et al. · Japanese Journal of Applied Physics · 1991 · 28 citations · Full text

Engineering, Plasma Physics, Accelerator Physic +19