Large-Area Electron Cyclotron Resonance Plasma Source with Permanent Magnets

Abstract

A large-area electron cyclotron resonance (ECR) plasma is generated by using permanent magnets and applying the whistler-mode launching of microwaves. A uniform plasma is produced with the uniformity of ±3.5% over 20 cm and ±1.8% over 16 cm in diameter; the plasma space potential is about 17 V with the uniformity of ±1% over 20 cm. The maximum ion current density is about 11.5 mA·cm -2 . The purity of the produced plasma is high. No damage was found after the operation for 100 h with the microwave power of 600 W.