Concepedia

Tatsushi Kuno

TK

2

Publications

35

Citations

2

H-Index

1996

Active since

Affiliations

Nagoya University(Current)

Koken (Japan)

Tatsushi Kuno is an author at Nagoya University specializing in microelectronics, applied physics, and natural sciences.

Top concepts

Publications per year

1996–1997

2

Publications

2

Influence on selective SiO2/Si etching of carbon atoms produced by CH4 addition to a C4F8 permanent magnet electron cyclotron resonance etching plasma

Shoji Den, Tatsushi Kuno, Masafumi Ito et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 21 citations

, , +20

Diagnostics of Fluorocarbon Radicals in a Large-area Permanent Magnet Electron Cyclotron Resonance Etching Plasma

Shoji Den, Tatsushi Kuno, Masafumi Ito et al. · Japanese Journal of Applied Physics · 1996 · 14 citations

, , +15

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