D.T. Price

Acid-catalyzed nitronate cycloaddition reactions. Useful syntheses and simple transformations of 3-acyl- and 3-alkenylisoxazolines

Peter A. Wade, Nayan V. Amin, Hwa Kwo Yen et al. · The Journal of Organic Chemistry · 1984 · 61 citations

Engineering, Heterocyclic, Donut Icon +11

Contact and via structures with copper interconnects fabricated using dual Damascene technology

S. Lakshminarayanan, Joseph M. Steigerwald, D.T. Price et al. · IEEE Electron Device Letters · 1994 · 61 citations

Chemical-mechanical Polishing, Engineering, Mechanical Engineering +22

Chemical-mechanical polishing of copper with oxide and polymer interlevel dielectrics

R.J. Gutmann, Joseph M. Steigerwald, Lü You et al. · Thin Solid Films · 1995 · 57 citations

Chemical-mechanical Polishing, Materials Science, Chemical Engineering +6

Damascene copper interconnects with polymer ILDs

D.T. Price, R.J. Gutmann, S. P. Murarka · Thin Solid Films · 1997 · 53 citations

Materials Science, Engineering, Semiconducting Polymer +6

Integration of copper multilevel interconnects with oxide and polymer interlevel dielectrics

R.J. Gutmann, T. Paul Chow, S. Lakshminarayanan et al. · Thin Solid Films · 1995 · 27 citations

Materials Science, Electrical Engineering, Polymer Interlevel Dielectrics +8