Concepedia

Ei Yano

EY

9

Publications

246

Citations

9

H-Index

1996

Active since

Affiliations

Association of Super-Advanced Electronics(Current)

Fujitsu (Japan)

Pacific Northwest National Laboratory

Fujitsu (China)

Ei Yano is an author at Association of Super-Advanced Electronics specializing in engineering, chemistry, and materials science.

Top concepts

EngineeringChemistryMaterial SciencePolymer ChemistryApplied PhysicsPolymer SciencePolymersNatural SciencesQuantum ChemistryOptical Properties

Publications per year

1996–2000

9

Publications

9

Theoretical Calculation of Photoabsorption of Various Polymers in an Extreme Ultraviolet Region

Nobuyuki Matsuzawa, Hiroaki Oizumi, Shigeyasu Mori et al. · Japanese Journal of Applied Physics · 1999 · 48 citations

Optical Materials, Engineering, Responsive Polymers +24

Impact of 2-Methyl-2-Adamantyl Group Used for 193-nm Single-Layer Resist

Satoshi Takechi, Makoto Takahashi, Akiko Kotachi et al. · Journal of Photopolymer Science and Technology · 1996 · 42 citations · Full text

Materials Science, Cleavable Adamantyl Ester, Biofunctional Material +13

A Novel Polymer for a 193-nm Resist.

Koji Nozaki, Keiji Watanabe, Ei Yano et al. · Journal of Photopolymer Science and Technology · 1996 · 34 citations · Full text

Materials Science, Engineering, Electronic Materials +15

Theoretical estimation of absorption coefficients of various polymers at 13 nm

Nobuyuki Matsuzawa, Hiroaki Oizumi, Shigeyasu Mori et al. · Microelectronic Engineering · 2000 · 30 citations

Engineering, Theoretical Estimation, Computational Chemistry +17

New Protective Groups in Alicyclic Methacrylate Polymers for 193-nm Resists.

Koji Nozaki, Ei Yano · Journal of Photopolymer Science and Technology · 1997 · 30 citations · Full text

Engineering, Thf Polarity, Mevalonic Lactone +16

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