29
Publications
862
Citations
14
H-Index
28
Concepts
All Affiliations
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 12 | 12 | 684 |
2 | Applied Physics | 4 | 4 | 143 |
3 | Chemical Engineering | 4 | 4 | 208 |
4 | Biomolecular Engineering | 3 | 3 | 123 |
5 | Natural Sciences | 1 | 1 | 83 |
Koji Nozaki
×
15
Publications
825
Citations
14
H-Index
| Year | Citations | |
|---|---|---|
1990 | 188 | |
1991 | 126 | |
1992 | 114 | |
1990 | 83 | |
Alicyclic polymer for ArF and KrF excimer resist based on chemical amplification Yuko Kaimoto, Koji Nozaki, Satoshi Takechi, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Alicyclic PolymerEngineeringElectron-beam LithographyNovolac ResistKrf Excimer Lithography | 1992 | 59 |
1996 | 42 | |
1996 | 34 | |
1994 | 32 | |
1991 | 31 | |
1997 | 30 |
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