15
Publications
825
Citations
14
H-Index
1988
Active since
Koji Nozaki is an author at Fujitsu (Japan) specializing in engineering, chemistry, and materials science.
Top concepts
EngineeringChemistryMaterial ScienceApplied PhysicsPolymer SciencePolymer ChemistryChemical EngineeringPolymersOrganic ChemistryMolecular Engineering
Publications per year
1988–1997
15
15
Alicyclic polymer for ArF and KrF excimer resist based on chemical amplification
Yuko Kaimoto, Koji Nozaki, Satoshi Takechi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1992 · 59 citations
Alicyclic Polymer, Engineering, Electron-beam Lithography +21
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1–5 of 15