Maximilian Rumler

Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques

Christian Steinberg, Maximilian Rumler, Manuel Runkel et al. · Microelectronic Engineering · 2017 · 18 citations

Engineering, Materials Engineering, Materials Science +17

Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy

Maximilian Rumler, Mathias Rommel, Jürgen Erlekampf et al. · Journal of Applied Physics · 2012 · 14 citations · Full text

Natural Sciences, Materials Science, Physics +17

Accuracy of wafer level alignment with substrate conformal imprint lithography

R. Fader, Mathias Rommel, Anton J. Bauer et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 12 citations

Engineering, Materials Engineering, Materials Science +13