R. Fader

Statistics

Publications

Citations

H-Index

Active since

2012

Affiliations

Fraunhofer Institute for Integrated Systems and Device Technology(Current)

Friedrich-Alexander-Universität Erlangen-Nürnberg

Schott (Germany)

SUSS MicroTec (Germany)

Micro Resist Technology (Germany)

R. Fader is an author at Fraunhofer Institute for Integrated Systems and Device Technology specializing in imprint lithography, materials engineering, and materials science.

Publications per year

2012–2016

Publications

Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography

H. Schmitt, P. Duempelmann, R. Fader et al. · Microelectronic Engineering · 2012 · 36 citations · Full text

Engineering, Materials Engineering, Materials Science +11

Novel organic polymer for UV-enhanced substrate conformal imprint lithography

R. Fader, H. Schmitt, Mathias Rommel et al. · Microelectronic Engineering · 2012 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +12

Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings

M Foerthner, M. Rumler, F. B. Stumpf et al. · Applied Physics A · 2016 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +11

Accuracy of wafer level alignment with substrate conformal imprint lithography

R. Fader, Mathias Rommel, Anton J. Bauer et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 12 citations

Engineering, Materials Engineering, Materials Science +13

1–4 of 4