M. Rumler

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Active since

2013

Affiliations

Friedrich-Alexander-Universität Erlangen-Nürnberg(Current)

Fraunhofer Institute for Integrated Systems and Device Technology

M. Rumler is an author at Friedrich-Alexander-Universität Erlangen-Nürnberg specializing in materials science, materials engineering, and mask fabrication.

Publications per year

2013–2018

Publications

Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings

M Foerthner, M. Rumler, F. B. Stumpf et al. · Applied Physics A · 2016 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +11

Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching

Mathias Rommel, M. Rumler, A. Haas et al. · Microelectronic Engineering · 2013 · 10 citations

Engineering, Materials Engineering, Materials Science +16

Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy

F. B. Stumpf, A. A. Abu Quba, Peter Singer et al. · Journal of Applied Physics · 2018 · 10 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

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