Statistics
Publications
6
Citations
268
H-Index
6
Active since
2005
Kevin Cheng is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in engineering, materials engineering, and materials science.
Publications per year
2005–2018
6
6
Kevin Cheng, Ming‐Huan Yang, Wanda W. W. Chiu et al. · Macromolecular Rapid Communications · 2005 · 184 citations
Kaustuve Bhattacharyya, Chih-Ming Ke, Guo-Tsai Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations
Multi-wavelength approach towards on-product overlay accuracy and robustness
Guo-Tsai Huang, Cathy Wang, Kai-Hsiung Chen et al. · 2018 · 13 citations
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