Kashish Sharma

Thermal atomic layer etching of crystalline aluminum nitride using sequential, self-limiting hydrogen fluoride and Sn(acac)2 reactions and enhancement by H2 and Ar plasmas

Nicholas R. Johnson, Huaxing Sun, Kashish Sharma et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 69 citations

Natural Sciences, Materials Engineering, Materials Science +17

Relation between Reactive Surface Sites and Precursor Choice for Area-Selective Atomic Layer Deposition Using Small Molecule Inhibitors

Marc J. M. Merkx, Athanasios Angelidis, Alfredo Mameli et al. · The Journal of Physical Chemistry C · 2022 · 58 citations · Full text

Natural Sciences, Chemical Engineering, Chemistry +17

Spatial atomic layer deposition on flexible substrates using a modular rotating cylinder reactor

Kashish Sharma, Robert A. Hall, Steven M. George · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 45 citations

Natural Sciences, Materials Engineering, Materials Science +15

Optical modeling of plasma-deposited ZnO films: Electron scattering at different length scales

Harm C. M. Knoops, Bas W. H. van de Loo, Sjoerd Smit et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 41 citations · Full text

Natural Sciences, Materials Science, Physics +17

Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes

Kashish Sharma, Dmitri Routkevitch, Natalia Varaksa et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 40 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17