Concepedia

Susumu Naito

SN

6

Publications

282

Citations

6

H-Index

1990

Active since

Affiliations

Nagoya University(Current)

Denso (United States)

Susumu Naito is an author at Nagoya University specializing in spectroscopy, natural sciences, and physics.

Top concepts

PhysicsSpectroscopyNatural SciencesChemistryEngineeringPlasma PhysicsPlasma ScienceApplied PhysicsHydrogenOptoelectronics

Publications per year

1990–2001

6

Publications

6

Spatial Distribution of SiH<sub>3</sub> Radicals in RF Silane Plasma

Naoshi Itabashi, Nobuki Nishiwaki, Mitsuo Magane et al. · Japanese Journal of Applied Physics · 1990 · 152 citations

Engineering, Plasma Science, Rf Silane Plasma +17

Effect of Rare Gas Dilution on CH<sub>3</sub> Radical Density in RF-Discharge CH<sub>4</sub> Plasma

Susumu Naito, Masanobu Ikeda, Nobuei Ito et al. · Japanese Journal of Applied Physics · 1993 · 48 citations

Engineering, Physics, Natural Sciences +14

Correlation between CH<sub>3</sub>Radical Density and Carbon Thin-Film Formation in RF Discharge CH<sub>4</sub>Plasma

Susumu Naito, Nobuei Ito, Tadashi Hattori et al. · Japanese Journal of Applied Physics · 1994 · 24 citations

H<sub>2</sub>Partial Pressure Dependences of CH<sub>3</sub>Radical Density and Effects of H<sub>2</sub>Dilution on Carbon Thin-Film Formation in RF Discharge CH<sub>4</sub>Plasma

Susumu Naito, Nobuei Ito, Tadashi Hattori et al. · Japanese Journal of Applied Physics · 1995 · 21 citations

Development of Planar Oxygen Sensor

Susumu Naito, Tomio Sugiyama, Yasuki Nakamura · SAE technical papers on CD-ROM/SAE technical paper series · 2001 · 19 citations

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