Concepedia

Mitsuo Magane

MM

3

Publications

253

Citations

3

H-Index

1990

Active since

Affiliations

Nagoya University(Current)

Institute for Molecular Science

Electrotechnical Institute

Mitsuo Magane is an author at Nagoya University specializing in engineering, physics, and applied physics.

Top concepts

Publications per year

1990–1990

3

Publications

3

Spatial Distribution of SiH<sub>3</sub> Radicals in RF Silane Plasma

Naoshi Itabashi, Nobuki Nishiwaki, Mitsuo Magane et al. · Japanese Journal of Applied Physics · 1990 · 152 citations

, , +17

Measurements of the CF Radical in DC Pulsed CF<sub>4</sub>/H<sub>2</sub> Discharge Plasma Using Infrared Diode Laser Absorption Spectroscopy

Mitsuo Magane, Naoshi Itabashi, Nobuki Nishiwaki et al. · Japanese Journal of Applied Physics · 1990 · 52 citations

, , +12

SiH<sub>3</sub> Radical Density in Pulsed Silane Plasma

Naoshi Itabashi, Nobuki Nishiwaki, Mitsuo Magane et al. · Japanese Journal of Applied Physics · 1990 · 49 citations

, , +12

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