Concepedia

Nobuki Nishiwaki

NN

6

Publications

485

Citations

6

H-Index

1988

Active since

Affiliations

Nagoya University(Current)

Institute for Molecular Science

Electrotechnical Institute

Nobuki Nishiwaki is an author at Nagoya University specializing in engineering, physics, and applied physics.

Top concepts

PhysicsEngineeringApplied PhysicsSpectroscopyNatural SciencesPlasma PhysicsChemistryPlasma ScienceOptoelectronicsOptical Properties

Publications per year

1988–1990

6

Publications

6

Spatial Distribution of SiH<sub>3</sub> Radicals in RF Silane Plasma

Naoshi Itabashi, Nobuki Nishiwaki, Mitsuo Magane et al. · Japanese Journal of Applied Physics · 1990 · 152 citations

Engineering, Plasma Science, Rf Silane Plasma +17

Diffusion Coefficient and Reaction Rate Constant of the SiH<sub>3</sub> Radical in Silane Plasma

Naoshi Itabashi, Kozo Kato, Nobuki Nishiwaki et al. · Japanese Journal of Applied Physics · 1989 · 83 citations

Pulsed Sih 4, Silane Plasma, Engineering +15

Measurement of the SiH<sub>3</sub> Radical Density in Silane Plasma using Infrared Diode Laser Absorption Spectroscopy

Naoshi Itabashi, Kozo Kato, Nobuki Nishiwaki et al. · Japanese Journal of Applied Physics · 1988 · 80 citations

Engineering, Absorption Spectroscopy, Chemistry +17

Detection of the silylene ν2 band by infrared diode laser kinetic spectroscopy

Chikashi Yamada, Hideto Kanamori, Eizi Hirota et al. · The Journal of Chemical Physics · 1989 · 69 citations · Full text

Optical Materials, Engineering, Chemistry +18

Measurements of the CF Radical in DC Pulsed CF<sub>4</sub>/H<sub>2</sub> Discharge Plasma Using Infrared Diode Laser Absorption Spectroscopy

Mitsuo Magane, Naoshi Itabashi, Nobuki Nishiwaki et al. · Japanese Journal of Applied Physics · 1990 · 52 citations

Engineering, Physics, Cf Radical Density +12

Rows per page

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