Concepedia
Statistics
Publications
13
Citations
644
H-Index
12
Active since
1988
Affiliations
Nagoya University(Current)
Institute for Molecular Science
Hitachi (Japan)
Electrotechnical Institute
University of Electro-Communications
Naoshi Itabashi is an author at Nagoya University specializing in natural sciences, chemistry, and spectroscopy.
Publications per year
1988–2011
Spatial Distribution of SiH<sub>3</sub> Radicals in RF Silane Plasma
Naoshi Itabashi, Nobuki Nishiwaki, Mitsuo Magane et al. · Japanese Journal of Applied Physics · 1990 · 152 citations
Natural Sciences, Chemistry, Materials Science +12
Diffusion Coefficient and Reaction Rate Constant of the SiH<sub>3</sub> Radical in Silane Plasma
Naoshi Itabashi, Kozo Kato, Nobuki Nishiwaki et al. · Japanese Journal of Applied Physics · 1989 · 84 citations
Natural Sciences, Chemistry, Physics +14
Measurement of the SiH<sub>3</sub> Radical Density in Silane Plasma using Infrared Diode Laser Absorption Spectroscopy
Naoshi Itabashi, Kozo Kato, Nobuki Nishiwaki et al. · Japanese Journal of Applied Physics · 1988 · 80 citations
Natural Sciences, Materials Science, Physics +15
Detection of the silylene ν2 band by infrared diode laser kinetic spectroscopy
Chikashi Yamada, Hideto Kanamori, Eizi Hirota et al. · The Journal of Chemical Physics · 1989 · 69 citations · Full text
Natural Sciences, Chemistry, Chemical Kinetics +16
Mechanism of Radical Control in Capacitive RF Plasma for ULSI Processing
Tetsuya Tatsumi, Hisataka Hayashi, Satoshi Morishita et al. · Japanese Journal of Applied Physics · 1998 · 63 citations
Natural Sciences, Chemistry, Physics +17
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