Simon Karecki

The Use of Unsaturated Fluorocarbons for Dielectric Etch Applications

Ritwik Chatterjee, Simon Karecki, R. Reif et al. · Journal of The Electrochemical Society · 2002 · 38 citations

Engineering, Chemical Engineering, Environmental Engineering +13

Evaluation of C[sub 4]F[sub 8]O as an Alternative Plasma-Enhanced Chemical Vapor Deposition Chamber Clean Chemistry

Laura Pruette, Simon Karecki, R. Reif et al. · Journal of The Electrochemical Society · 2000 · 33 citations

Engineering, Chemical Engineering, Chemistry +14

Use of Novel Hydrofluorocarbon and Iodofluorocarbon Chemistries for a High Aspect Ratio Via Etch in a High Density Plasma Etch Tool

Simon Karecki, Laura Pruette, R. Reif et al. · Journal of The Electrochemical Society · 1998 · 27 citations

Engineering, Chemical Engineering, Materials Engineering +13

Evaluation of trifluoroacetic anhydride as an alternative plasma enhanced chemical vapor deposition chamber clean chemistry

Laura Pruette, Simon Karecki, R. Reif et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 27 citations

Natural Sciences, Chemical Engineering, Materials Science +16

Fourier transform infrared spectroscopy of effluents from pulsed plasmas of 1,1,2,2-tetrafluoroethane, hexafluoropropylene oxide, and difluoromethane

Catherine B. Labelle, Simon Karecki, R. Reif et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 21 citations

Natural Sciences, Chemistry, Physics +13